Characterization of dual-target co-sputtered novel Hf-doped ZnSnO semiconductors and the enhanced stability of its associated thin film transistors

Published 2016 View Full Article

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Title
Characterization of dual-target co-sputtered novel Hf-doped ZnSnO semiconductors and the enhanced stability of its associated thin film transistors
Authors
Keywords
HfZnSnO thin film, Thin film transistors, Dual-target magnetron co-sputtering
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 681, Issue -, Pages 81-87
Publisher
Elsevier BV
Online
2016-05-01
DOI
10.1016/j.jallcom.2016.04.167

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