High performance VO2 thin films growth by DC magnetron sputtering at low temperature for smart energy efficient window application

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Title
High performance VO2 thin films growth by DC magnetron sputtering at low temperature for smart energy efficient window application
Authors
Keywords
Vanadium dioxide films, Magnetron sputtering, substrate bias voltage, substrate temperature
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 659, Issue -, Pages 198-202
Publisher
Elsevier BV
Online
2015-11-13
DOI
10.1016/j.jallcom.2015.11.047

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