Joint optimisation of uncertain distributed manufacturing and preventive maintenance for semiconductor wafers considering multi-energy complementary
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Title
Joint optimisation of uncertain distributed manufacturing and preventive maintenance for semiconductor wafers considering multi-energy complementary
Authors
Keywords
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Journal
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH
Volume -, Issue -, Pages 1-22
Publisher
Informa UK Limited
Online
2022-05-27
DOI
10.1080/00207543.2022.2075292
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