Attention Mechanism-Based Root Cause Analysis for Semiconductor Yield Enhancement Considering the Order of Manufacturing Processes

Published 2022 View Full Article

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Title
Attention Mechanism-Based Root Cause Analysis for Semiconductor Yield Enhancement Considering the Order of Manufacturing Processes
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 35, Issue 2, Pages 282-290
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2022-03-05
DOI
10.1109/tsm.2022.3156600

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