An investigation of surface contamination introduced during He+ implantation and subsequent effects on the thermal oxidation of Cu

Title
An investigation of surface contamination introduced during He+ implantation and subsequent effects on the thermal oxidation of Cu
Authors
Keywords
Copper, Oxidation, Implantation, Microstructure
Journal
APPLIED SURFACE SCIENCE
Volume 579, Issue -, Pages 152163
Publisher
Elsevier BV
Online
2021-12-11
DOI
10.1016/j.apsusc.2021.152163

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