Structural and thermal analysis of polycrystalline diamond thin film grown on GaN-on-SiC with an interlayer of 20 nm PECVD-SiN

Title
Structural and thermal analysis of polycrystalline diamond thin film grown on GaN-on-SiC with an interlayer of 20 nm PECVD-SiN
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 120, Issue 12, Pages 121603
Publisher
AIP Publishing
Online
2022-03-25
DOI
10.1063/5.0083841

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