All-SiC Fiber-Optic Sensor Based on Direct Wafer Bonding for High Temperature Pressure Sensing
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Title
All-SiC Fiber-Optic Sensor Based on Direct Wafer Bonding for High Temperature Pressure Sensing
Authors
Keywords
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Journal
Photonic Sensors
Volume 12, Issue 2, Pages 130-139
Publisher
Springer Science and Business Media LLC
Online
2021-10-04
DOI
10.1007/s13320-021-0640-7
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- An optical absolute pressure sensor for high-temperature applications, fabricated directly on a fiber
- (2009) Frederik Ceyssens et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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