Simulated and measured surface roughness in high-speed grinding of silicon carbide wafers
Published 2016 View Full Article
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Title
Simulated and measured surface roughness in high-speed grinding of silicon carbide wafers
Authors
Keywords
Silicon carbide, Grinding, Surface generation, Modelling, Simulation, Micro-vibration
Journal
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 91, Issue 1-4, Pages 719-730
Publisher
Springer Nature
Online
2016-11-27
DOI
10.1007/s00170-016-9805-8
References
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