An ultrafast piezoelectric Z-scanner with a resonance frequency above 1.1 MHz for high-speed atomic force microscopy
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Title
An ultrafast piezoelectric Z-scanner with a resonance frequency above 1.1 MHz for high-speed atomic force microscopy
Authors
Keywords
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Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 93, Issue 1, Pages 013701
Publisher
AIP Publishing
Online
2022-01-03
DOI
10.1063/5.0072722
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