Influence of chemical vapor precursor flow rate on the structure and thermal stability of phase-modulated VSiCN/Ag coatings

Published 2021 View Full Article

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Title
Influence of chemical vapor precursor flow rate on the structure and thermal stability of phase-modulated VSiCN/Ag coatings
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 39, Issue 6, Pages 063409
Publisher
American Vacuum Society
Online
2021-10-13
DOI
10.1116/6.0001302

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