Journal
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 21, Issue 2, Pages 1189-1192Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMECH.2015.2511782
Keywords
Microactuators; microrobots; microfabrications; piezoelectric actuator
Categories
Funding
- JSPS KAKENHI [25709017]
- Grants-in-Aid for Scientific Research [25709017] Funding Source: KAKEN
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Actuator miniaturization to submillimeter scales encounters difficult fabrication and serious torque dissipation caused by adhesion forces. This study presents a design for micro ultrasonic motors that enables microfabrication and motor actuation. The stator prototype, which is the smallest ultrasonic motor reported to date, comprises a metallic cube with a side length of 0.5 mm and a through-hole of 0.33-mm diameter at its center, and two piezoelectric elements adhered to its sides. Under two different applied voltages, the stator generates a driving force and transfers it to the rotor inserted in the through-hole. Performance assessments show that this micromotor generates an average angular velocity of 123 rad/s and a peak torque of 0.2 mu N.m. This torque value exceeds that of the existing micromotors.
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