Epitaxial Lift-Off and Transfer of III-N Materials and Devices from SiC Substrates

Published 2016 View Full Article

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Title
Epitaxial Lift-Off and Transfer of III-N Materials and Devices from SiC Substrates
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 29, Issue 4, Pages 384-389
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-08-12
DOI
10.1109/tsm.2016.2599839

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