Performance of Machine Learning Algorithms for Class-Imbalanced Process Fault Detection Problems

Published 2016 View Full Article

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Title
Performance of Machine Learning Algorithms for Class-Imbalanced Process Fault Detection Problems
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 29, Issue 4, Pages 436-445
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-08-25
DOI
10.1109/tsm.2016.2602226

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