Thermomechanical fatigue damage modeling and material parameter calibration for thin film metallizations

Title
Thermomechanical fatigue damage modeling and material parameter calibration for thin film metallizations
Authors
Keywords
Semiconductors, Fatigue modeling, Fatigue test methods, Finite elements, Poly-heater experiments
Journal
INTERNATIONAL JOURNAL OF FATIGUE
Volume 155, Issue -, Pages 106627
Publisher
Elsevier BV
Online
2021-10-30
DOI
10.1016/j.ijfatigue.2021.106627

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