Manipulation of Dusty Plasma Properties via Driving Voltage Waveform Tailoring in a Capacitive Radiofrequency Discharge

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Title
Manipulation of Dusty Plasma Properties via Driving Voltage Waveform Tailoring in a Capacitive Radiofrequency Discharge
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 44, Issue 4, Pages 545-548
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-12-10
DOI
10.1109/tps.2015.2503731

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