Development of Laser-Micromachined 4H-SiC MEMS Piezoresistive Pressure Sensors for Corrosive Environments

Title
Development of Laser-Micromachined 4H-SiC MEMS Piezoresistive Pressure Sensors for Corrosive Environments
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume -, Issue -, Pages 1-6
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2022-02-22
DOI
10.1109/ted.2022.3148702

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