Piezoelectric Based MEMS Acoustic Sensor for Wide Frequency Applications

Published 2021 View Full Article

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Title
Piezoelectric Based MEMS Acoustic Sensor for Wide Frequency Applications
Authors
Keywords
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Journal
IEEE SENSORS JOURNAL
Volume 21, Issue 24, Pages 27352-27360
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2021-11-02
DOI
10.1109/jsen.2021.3124639

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