Studies on High-Voltage GaN-on-Si MIS-HEMTs Using LPCVD Si3N4as Gate Dielectric and Passivation Layer

Title
Studies on High-Voltage GaN-on-Si MIS-HEMTs Using LPCVD Si3N4as Gate Dielectric and Passivation Layer
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 63, Issue 2, Pages 731-738
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-01-02
DOI
10.1109/ted.2015.2510445

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