Effect of the post-heating temperatures on the microstructure, mechanical and electrical properties of silicon nitride thin films
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Title
Effect of the post-heating temperatures on the microstructure, mechanical and electrical properties of silicon nitride thin films
Authors
Keywords
Silicon nitride, Temperature, Microstructure, Sheet resistance, Thin film thermocouples
Journal
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2021-12-11
DOI
10.1016/j.ceramint.2021.12.104
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