A Force Rebalanced Micro-Gyroscope Driven by Voltages Oscillating at Half of Structure’s Resonant Frequency

Published 2016 View Full Article

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Title
A Force Rebalanced Micro-Gyroscope Driven by Voltages Oscillating at Half of Structure’s Resonant Frequency
Authors
Keywords
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Journal
IEEE SENSORS JOURNAL
Volume 16, Issue 24, Pages 8897-8907
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-10-20
DOI
10.1109/jsen.2016.2618372

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