Journal
IEEE SENSORS JOURNAL
Volume 16, Issue 13, Pages 5145-5151Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2016.2567220
Keywords
BaTiO3-CuO; Ag; carbon dioxide; gas sensor
Funding
- Department of Electronics and Information Technology, Ministry of Communication and Information Technology, Government of India
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Thin films of BaTiO3-CuO doped with Ag have been evaluated for their carbon dioxide sensing characteristics. The effect of various parameters, such as Ag doping, annealing conditions, film thickness, electrode dimensions, and operating temperature on sensitivity has been explored. The thin films in the range of 250 nm, with 1% Ag doping and no post-deposition annealing, display the best sensitivity at an optimum operating temperature of 250 degrees C. We correlate sensitivity with material characteristics as determined by X-ray diffraction, X-ray photoelectron spectroscopy, scanning electron microscope, and electron probe microscopic analysis. Sensitivity to CO2 increases with the reduction in electrode dimensions, with 500 nm electrodes giving the best sensitivity of 19% for 350 ppm and 80% for 1000 ppm of CO2. The sensor shows very low cross sensitivity to CO, NO2, and SO2.
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