Humidity Sensors Based on Photolithographically Patterned PVA Films Deposited on SAW Resonators

Title
Humidity Sensors Based on Photolithographically Patterned PVA Films Deposited on SAW Resonators
Authors
Keywords
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Journal
IEEE SENSORS JOURNAL
Volume 16, Issue 1, Pages 13-14
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-08-14
DOI
10.1109/jsen.2015.2468082

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