Correlation Between Optical, Morphological, and Compositional Properties of Aluminum Nitride Thin Films by Pulsed Laser Deposition

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Title
Correlation Between Optical, Morphological, and Compositional Properties of Aluminum Nitride Thin Films by Pulsed Laser Deposition
Authors
Keywords
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Journal
IEEE SENSORS JOURNAL
Volume 16, Issue 2, Pages 359-364
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-08-14
DOI
10.1109/jsen.2015.2466467

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