A Framework to Calibrate the Scanning Electron Microscope Under Variational Magnifications

Published 2016 View Full Article

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Journal

IEEE PHOTONICS TECHNOLOGY LETTERS

Volume 28, Issue 16, Pages 1715-1718

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2016-01-28

DOI

10.1109/lpt.2016.2522758

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