EFFECT OF THERMAL ANNEALING AND DEPOSITION CONDITIONS ON THE STRUCTURE AND MECHANICAL PROPERTIES OF A MULTILAYER NITRIDE COATING BASED ON Ta

Title
EFFECT OF THERMAL ANNEALING AND DEPOSITION CONDITIONS ON THE STRUCTURE AND MECHANICAL PROPERTIES OF A MULTILAYER NITRIDE COATING BASED ON Ta
Authors
Keywords
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Journal
HIGH TEMPERATURE MATERIAL PROCESSES
Volume 20, Issue 1, Pages 85-92
Publisher
Begell House
Online
2016-06-08
DOI
10.1615/hightempmatproc.2016017252

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