Control of Competing Thermodynamics and Kinetics in Vapor Phase Thin-Film Growth of Nitrides and Borides
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Title
Control of Competing Thermodynamics and Kinetics in Vapor Phase Thin-Film Growth of Nitrides and Borides
Authors
Keywords
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Journal
Frontiers in Chemistry
Volume 9, Issue -, Pages -
Publisher
Frontiers Media SA
Online
2021-07-27
DOI
10.3389/fchem.2021.642388
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