Beam shaping and probe characterization in the scanning electron microscope
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Title
Beam shaping and probe characterization in the scanning electron microscope
Authors
Keywords
Electron diffraction, SEM, Electron beam structuring, Spot shape measurement, Electron vortex beam
Journal
ULTRAMICROSCOPY
Volume 225, Issue -, Pages 113268
Publisher
Elsevier BV
Online
2021-04-04
DOI
10.1016/j.ultramic.2021.113268
References
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