Beam shaping and probe characterization in the scanning electron microscope

Title
Beam shaping and probe characterization in the scanning electron microscope
Authors
Keywords
Electron diffraction, SEM, Electron beam structuring, Spot shape measurement, Electron vortex beam
Journal
ULTRAMICROSCOPY
Volume 225, Issue -, Pages 113268
Publisher
Elsevier BV
Online
2021-04-04
DOI
10.1016/j.ultramic.2021.113268

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