Electrical transport properties of thermally stable n-ZnO/AlN/p-Si diode grown using RF sputtering
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Title
Electrical transport properties of thermally stable n-ZnO/AlN/p-Si diode grown using RF sputtering
Authors
Keywords
Electrical properties, RF Sputtering, ZnO, Thermal stability
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 128, Issue -, Pages 105734
Publisher
Elsevier BV
Online
2021-02-16
DOI
10.1016/j.mssp.2021.105734
References
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