Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition

Published 2021 View Full Article

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Title
Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 39, Issue 4, Pages 042403
Publisher
American Vacuum Society
Online
2021-06-08
DOI
10.1116/6.0001033

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