A novel hypergraph convolution network-based approach for predicting the material removal rate in chemical mechanical planarization

A context-aware diversity-oriented knowledge recommendation approach for smart engineering solution design

(2021) Xinyu Li et al.   KNOWLEDGE-BASED SYSTEMS

Petri-net-based dynamic scheduling of flexible manufacturing system via deep reinforcement learning with graph convolutional network

(2020) Liang Hu et al.   JOURNAL OF MANUFACTURING SYSTEMS

A Knowledge Graph-Aided Concept–Knowledge Approach for Evolutionary Smart Product–Service System Development

(2020) Xinyu Li et al.   JOURNAL OF MECHANICAL DESIGN

A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks

(2020) Sinyoung Kim et al.   JOURNAL OF INTELLIGENT MANUFACTURING

A wafer-scale material removal rate model for chemical mechanical planarization

(2020) Qinzhi Xu et al.   ECS Journal of Solid State Science and Technology

Influence of abrasive morphology and size dispersity of Cu barrier metal slurry on removal rates and wafer surface quality in chemical mechanical planarization

(2020) Seungchul Hong et al.   MICROELECTRONIC ENGINEERING

A Comprehensive Survey on Graph Neural Networks

(2020) Zonghan Wu et al.   IEEE Transactions on Neural Networks and Learning Systems

A Comprehensive Survey of Prognostics and Health Management Based on Deep Learning for Autonomous Ships

(2019) Andre Listou Ellefsen et al.   IEEE TRANSACTIONS ON RELIABILITY

Using graphs to link data across the product lifecycle for enabling smart manufacturing digital threads

(2019) Thomas D. Hedberg et al.   JOURNAL OF COMPUTING AND INFORMATION SCIENCE IN ENGINEERING

Spatial temporal graph convolutional networks for skeleton-based dynamic hand gesture recognition

(2019) Yong Li et al.   EURASIP Journal on Image and Video Processing

A graph-based context-aware requirement elicitation approach in smart product-service systems

(2019) Zuoxu Wang et al.   INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH

Object-oriented event-graph modeling formalism to simulate manufacturing systems in the Industry 4.0 era

(2019) Lorenzo Tiacci   SIMULATION MODELLING PRACTICE AND THEORY

Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process

(2018) Ki Bum Lee et al.   JOURNAL OF INTELLIGENT MANUFACTURING

Bearing remaining useful life prediction based on deep autoencoder and deep neural networks

(2018) Lei Ren et al.   JOURNAL OF MANUFACTURING SYSTEMS

Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks

(2018) Xiaodong Jia et al.   JOURNAL OF PROCESS CONTROL

Prediction of Material Removal Rate for Chemical Mechanical Planarization Using Decision Tree-Based Ensemble Learning

(2018) Zhixiong Li et al.   JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME

Semi-empirical material removal rate distribution model for SiO2 chemical mechanical polishing (CMP) processes

(2013) H.S. Lee et al.   PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

An Analytical Approach to Determine the Pressure Distribution During Chemical Mechanical Polishing

(2012) Christian Ludwig et al.   JOURNAL OF ELECTRONIC MATERIALS

A wafer-scale material removal rate profile model for copper chemical mechanical planarization

(2011) Hyunseop Lee et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

Process Performance Prediction for Chemical Mechanical Planarization (CMP) by Integration of Nonlinear Bayesian Analysis and Statistical Modeling

(2010) Zhenyu Kong et al.   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Ontology-based reconfiguration agent for intelligent mechatronic systems in flexible manufacturing

(2010) Yazen Alsafi et al.   ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING