Plasma-induced oxygen vacancies enabled ultrathin ZnO films for highly sensitive detection of triethylamine
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Title
Plasma-induced oxygen vacancies enabled ultrathin ZnO films for highly sensitive detection of triethylamine
Authors
Keywords
Thin film, ZnO sensor, Atomic layer deposition, Ar plasma, Oxygen vacancy
Journal
JOURNAL OF HAZARDOUS MATERIALS
Volume 415, Issue -, Pages 125757
Publisher
Elsevier BV
Online
2021-03-27
DOI
10.1016/j.jhazmat.2021.125757
References
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