Fully automated spectroscopic ellipsometry analyses: Application to MoOx thin films
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Title
Fully automated spectroscopic ellipsometry analyses: Application to MoOx thin films
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 129, Issue 24, Pages 243102
Publisher
AIP Publishing
Online
2021-06-23
DOI
10.1063/5.0052210
References
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