4.6 Article

16 x 4 Linear Solar-Blind UV Photoconductive Detector Array Based on β-Ga2O3 Film

Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 68, Issue 7, Pages 3435-3438

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2021.3081522

Keywords

Photodetectors; Lighting; Standards; Telecommunications; X-ray scattering; Wires; Sputtering; beta-Ga2O3; linear array; photodetector; solar-blind ultraviolet (UV) detection

Funding

  1. National Natural Science Foundation of China [61774019]

Ask authors/readers for more resources

This article describes a 16 x 4 linear array of beta-Ga2O3-based metal-semiconductor-metal photodetector for solar-blind sensing at 254 nm wavelength. The beta-Ga2O3 film is grown using MOCVD equipment, and the photodetectors are constructed with standard processes. The photodetectors exhibit excellent performance with key parameters like photo responsivity and detectivity.
In this article, a 16 x 4 linear array of beta-Ga2O3-based metal-semiconductor-metal structured photodetector is described for solar-blind sensing operation at a wavelength of 254 nm. The beta-Ga2O3 film is grown by using metal-organic chemical vapor deposition (MOCVD) equipment, and the photodetectors are finished in constructing with standard photolithography and ion beam sputtering procedures. The results show that the dark current (Idark), photo-to-dark current ratio (PDCR), photo responsivity (R), specific detectivity (D*), exterl quantum efficiency (EQE), and linear dynamic region (LDR) are 1.94 pA, 2.95x 107, 139.56 A/W, 2.55 x10(15) Jones, 6.8x 104%, and 149.4 dB, at 10 V bias and 2000 mu W/cm(2) light intensity illumination. In addition, the standard deviation of R for this photodetector array is 10%. Overall, such a 16 x 4 linear array of beta-Ga2O3-based photodetectorarraymakes a progressin the field of Ga2O3 photodetectors.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.6
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

Article Physics, Multidisciplinary

Achieving highly-efficient H2S gas sensor by flower-like SnO2-SnO/porous GaN heterojunction

Zeng Liu, Ling Du, Shao-Hui Zhang, Ang Bian, Jun-Peng Fang, Chen-Yang Xing, Shan Li, Jin-Cheng Tang, Yu-Feng Guo, Wei-Hua Tang

Summary: A flower-like SnO2-SnO/porous GaN (FSS/PGaN) heterojunction was fabricated for the first time, involving a spraying process, hydrothermal preparation of FSS, and electrochemical wet etching of GaN. The loaded SnO2-SnO composites with p-n junctions on the PGaN surface exhibited excellent transport capability, achieving a short response time and release time for H2S sensing. The obtained sensor showed high stability and potential for various applications.

CHINESE PHYSICS B (2023)

Article Physics, Multidisciplinary

A self-powered ultraviolet photodetector based on a Ga2O3/Bi2WO6 heterojunction with low noise and stable photoresponse

Li-Li Yang, Yu-Si Peng, Zeng Liu, Mao-Lin Zhang, Yu-Feng Guo, Yong Yang, Wei-Hua Tang

Summary: A self-powered solar-blind ultraviolet (UV) photodetector (PD) was successfully fabricated on a Ga2O3/Bi2WO6 heterojunction. The PD demonstrated a distinct photovoltaic effect and excellent photodetection performance with an ultra-low dark current and a high light-to-dark current ratio in self-powered mode. The PD also showed a stable and fast response speed under different light intensities and voltages. Overall, the Ga2O3/Bi2WO6 heterojunction has the potential to be a candidate for self-powered and high-performance UV photodetectors.

CHINESE PHYSICS B (2023)

Article Physics, Multidisciplinary

Dramatic reduction in dark current of β-Ga2O3 ultraviolet photodectors via β-(Al0.25Ga0.75)2O3 surface passivation

Jian-Ying Yue, Xue-Qiang Ji, Shan Li, Xiao-Hui Qi, Pei-Gang Li, Zhen-Ping Wu, Wei-Hua Tang

Summary: In this study, solar-blind ultraviolet photodetectors with metal-semiconductor-metal structure were fabricated using β-(Al0.25Ga0.75)x(2)O(3)/β-Ga2O3 film. The performance of the β-Ga2O3 detector was significantly improved after surface passivation with β-(Al0.25Ga0.75)(2)O-3.

CHINESE PHYSICS B (2023)

Article Engineering, Electrical & Electronic

Enhanced Ultraviolet Detection by Constructing Ga2O3/TiO2 Heterojunction Photodiode Featuring Weak Light Signal Sensing

Xiao-Hui Qi, Zeng Liu, Xue-Qiang Ji, Jian-Ying Yue, Yu-Song Zhi, Shan Li, Zu-Yong Yan, Yu-Feng Guo, Wei-Hua Tang

Summary: In this article, a deep-ultraviolet (DUV) photodetector (PD) based on a Ga2O3/TiO2 planar heterojunction is fabricated using both the solution and the metalorganic chemical vapor deposition (MOCVD) methods. The PD exhibits impressive DUV sensing properties, including high responsivity (R), specific detectivity (D-*), and external quantum efficiency (EQE). The PD can operate stably in a self-powered mode and has potential for applications in energy-conserving DUV sensing systems.

IEEE SENSORS JOURNAL (2023)

Article Engineering, Electrical & Electronic

A Bandi flexible pressure sensor based on the composite of laser-induced graphene and AgNWs

Jiawei Zhang, Yixuan Cui, Chunxiao Liu, Xiangfu Wang, Weihua Tang

Summary: This paper introduces a new flexible pressure sensor designed with LIG/AgNWs composite to improve ultra-high sensitivity and stability. The dependence of sensor property on LIG/NMP concentration and coating layers was studied, and the sensor showed good sensitivity (56.9 kPa(-1)) and stable performance. Its application in bending fingers and high fives was also studied, and results demonstrate its suitability for human body dynamic posture monitoring.

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS (2023)

Article Engineering, Electrical & Electronic

High sensitivity Ga2O3 ultraviolet photodetector by one-step thermal oxidation of p-GaN films

Jinjin Wang, Xueqiang Ji, Zuyong Yan, Xu Yan, Chao Lu, Zhitong Li, Song Qi, Shan Li, Xiaohui Qi, Sai Zhang, Shengrun Hu, Peigang Li

Summary: Ga2O3 thin films were successfully prepared by one-step thermal oxidation of p-GaN thin films. The photodetector showed significantly reduced dark current and maintained the same order of magnitude of photocurrent, resulting in a large photo-to-dark current ratio. The device also exhibited high responsivity, super high external quantum efficiency, large detectivity, and fast response speed. The results demonstrate that the one-step thermal oxidation method is effective for preparing devices with high sensitivity, fast response, and high-resolution detection.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2023)

Article Materials Science, Multidisciplinary

Homoepitaxial Si-doped Gallium Oxide films by MOCVD with tunable electron concentrations and electrical properties

Xueqiang Ji, Jianying Yue, Xiaohui Qi, Zuyong Yan, Shan Li, Chao Lu, Zhitong Li, Zeng Liu, Song Qi, Xu Yan, Jinjin Wang, Shuang Wang, Peigang Li, Weihua Tang

Summary: In this study, stable and tunable electron concentration in fl-Ga2O3 homoepitaxial epitaxial films was achieved by using metal-organic chemical vapor deposition (MOCVD) on Fe-doped (010)-oriented fl-Ga2O3 substrates. The electrical properties of the films were found to vary depending on the concentration of Si ions incorporated during the growth process. The results suggest that stable and tunable electron concentration is crucial for optimizing high-power electronic devices based on fl-Ga2O3.

VACUUM (2023)

Article Nanoscience & Nanotechnology

Comprehensive Study on Ultra-Wide Band Gap La2O3/& epsilon;-Ga2O3 p-n Heterojunction Self-Powered Deep-UV Photodiodes for Flame Sensing

Zhaoying Xi, Zeng Liu, Lili Yang, Kai Tang, Lei Li, Gaohui Shen, Maolin Zhang, Shan Li, Yufeng Guo, Weihua Tang

Summary: In this study, a solar-blind UV photodetector based on a La2O3/e-Ga2O3 heterojunction was successfully fabricated, which possesses excellent reliability and sensitivity for flame detection without interference from other signals. The photodetector exhibits a self-powered photocurrent of 1.4 nA at zero bias due to the photovoltaic effect formed by the space charge region across the junction interface. Furthermore, the photodetector achieves a high photo-to-dark current ratio of 2.68 x 10(4), a high specific detectivity of 2.31 x 10(11) Jones, and a large responsivity of 1.67 mA/W under 254 nm UV light illumination and at a bias of 5 V. Additionally, the La2O3/e-Ga2O3 heterojunction photodetector can rapidly respond to flames in milliseconds without any applied biases. Based on these performances, this novel heterojunction is expected to be a candidate for future energy-efficient fire detection.

ACS APPLIED MATERIALS & INTERFACES (2023)

Article Physics, Applied

Solar-blind UV communication based on sensitive beta-Ga2O3 photoconductive detector array

Gaohui Shen, Zeng Liu, Chee-Keong Tan, Mingming Jiang, Shan Li, Yufeng Guo, Weihua Tang

Summary: A solar-blind UV photodetector array based on a metalorganic chemical vapor deposition-grown beta-Ga2O3 thin film is fabricated for optical communication application. The device demonstrates high performance with a significant photo-to-dark current ratio, high responsivity, high external quantum efficiency, high specific detectivity, and fast response time. The array shows good spectral selectivity and low background noise, enabling effective outputting of information signals in optical communication.

APPLIED PHYSICS LETTERS (2023)

Article Engineering, Environmental

MXene/biomass/chitosan carbon aerogel (MBC) with shared cathode and anode for the construction of high-efficiency asymmetric supercapacitor

Yinhua Cui, Qingshan Shi, Zeng Liu, Jingchun Lv, Chao Wang, Xiaobao Xie, Shaohui Zhang

Summary: In this study, a new approach is proposed to prepare flexible MXene/biomass/chitosan aerogel (MBC) electrodes with pseudo-capacitive properties through electro-static self-assembly and hydrothermal methods. The MBC-6 electrode, annealed by lyophilization, exhibits a volumetric specific capacitance of 1801.4 mF/cm3 and an ultra-high volume energy density of 33.4 Wh/L. This research presents a plausible approach for creating energy storage devices with high energy density and voltage window.

CHEMICAL ENGINEERING JOURNAL (2023)

Article Physics, Multidisciplinary

Highly-rectified hybrid p-MAPbBr3/n-GaN heterojunction ultraviolet photodetector featuring high-photoresponse

Maolin Zhang, Wanyu Ma, Qiong Zhang, Ang Bian, Zeng Liu, Lili Yang, Shan Li, Yufeng Guo, Weihua Tang

Summary: In this study, a heterojunction photodetector combining MAPbBr3 and GaN was constructed, and its detection capabilities were examined. The results demonstrated superior performance, including high rectification ratio and photo-to-dark current ratio. Additionally, the characteristics of the photodetector and possible methods for further performance enhancements were discussed.

PHYSICA SCRIPTA (2023)

Article Engineering, Multidisciplinary

High responsivity and fast response 8x8 β-Ga2O3 solar-blind ultraviolet imaging photodetector array

Gaohui Shen, Zeng Liu, Kai Tang, Shulin Sha, Lei Li, Chee-Keong Tan, Yufeng Guo, Weihua Tang

Summary: This study introduces an 8x8 Ga2O3 solar-blind ultraviolet photodetector array with high photo-response performance and uniform responsivity, which is of great significance for developing Ga2O3-based optoelectronic device applications.

SCIENCE CHINA-TECHNOLOGICAL SCIENCES (2023)

Article Materials Science, Multidisciplinary

An enhanced ultrasensitive solar-blind UV photodetector based on an asymmetric Schottky junction designed with graphene/β-Ga2O3/Ag

Song Qi, Jiahang Liu, Jianying Yue, Xueqiang Ji, Jiaying Shen, Yongtao Yang, Jinjin Wang, Shan Li, Zhenping Wu, Weihua Tang

Summary: In this work, a graphene/beta-Ga2O3/Ag asymmetric Schottky junction photodetector was constructed to address the issue of elevated dark currents in existing graphene/Ga2O3 devices. By taking advantage of the asymmetric structure design to suppress dark current and the transparent graphene electrode to increase carrier collection efficiency, the device achieved outstanding responsivity, detectivity, external quantum efficiency, and response time. Importantly, it exhibited low dark current and high light-to-dark ratio. Overall, the graphene/beta-Ga2O3/Ag asymmetric Schottky junction photodetector has considerable potential as a deep ultraviolet detector.

JOURNAL OF MATERIALS CHEMISTRY C (2023)

Article Optics

Preparation and Study of Ag Nanoparticles Composite Amorphous Gallium Oxide Photodetector

Xu Qiang, Yang Lili, Liu Zeng, Zhang Maolin, Li Shan, Tang Weihua

Summary: In this study, an Ag-NP composite amorphous Ga2O3 film DUV PD is prepared by room temperature magnetron sputtering technology. The PD exhibits excellent photodetection performance with low dark current, high PDCR, and enhanced UV light absorption. The introduction of Ag-NPs scatters more incident light into the Ga2O3 film layer, leading to increased absorption of UV light and a significant increase in photocurrent. This is further enhanced by the generation of hot carriers by Ag-NPs, which allows hot electrons to overcome the Schottky barriers and increase the photocurrent. The formation of Schottky barriers between Ag-NPs and Ga2O3 films also helps reduce the dark current in the amorphous Ga2O3. This study provides a viable solution to DUV PDs with low cost, dark current, and high PDCR.

ACTA OPTICA SINICA (2023)

No Data Available