Design and Experimental Assessment of Low-Noise Piezoelectric Microelectromechanical Systems Vibration Sensors

Published 2021 View Full Article

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Title
Design and Experimental Assessment of Low-Noise Piezoelectric Microelectromechanical Systems Vibration Sensors
Authors
Keywords
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Journal
IEEE SENSORS JOURNAL
Volume 21, Issue 16, Pages 17703-17711
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2021-06-04
DOI
10.1109/jsen.2021.3085825

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