Influences of different sputtering current on the microstructure and electrical properties of silicon nitride thin films deposited on cemented carbide tools

High-dielectric-constant silicon nitride thin films fabricated by radio frequency sputtering in Ar and Ar/N2 gas mixture

(2020) Chia-Yueh Chou et al.   THIN SOLID FILMS

Real-time tool wear monitoring using thin-film thermocouple

(2020) Tianxiang Li et al.   JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

Ion beam measurements for the investigation of TiN thin films deposited on different substrates by vacuum arc discharge

(2019) B. Abdallah et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Efficient silicon nitride SiN x :H antireflective and passivation layers deposited by atmospheric pressure PECVD for silicon solar cells

(2019) Jean‐François Lelièvre et al.   PROGRESS IN PHOTOVOLTAICS

Tool–Chip Interface Temperature Measurement in Interrupted and Continuous Oblique Cutting

(2018) Sinan Kesriklioglu et al.   JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME

Built-in thin film thermocouples in surface textures of cemented carbide tools for cutting temperature measurement

(2018) Jindang Li et al.   SENSORS AND ACTUATORS A-PHYSICAL

Anticorrosive yet conductive Hf/Si 3 N 4 multilayer coatings on AZ91D magnesium alloy by magnetron sputtering

(2017) Dongfang Zhang et al.   SURFACE & COATINGS TECHNOLOGY

Oxide-related defects in quantum dot containing Si-rich silicon nitride films

(2017) Lee A. Walsh et al.   THIN SOLID FILMS

Fabrication of amorphous silicon nitride thin films by radio-frequency sputtering assisted by an inductively coupled plasma

(2017) Yuki Ishii et al.   THIN SOLID FILMS

Preparation and thermal volatility characteristics of In2O3/ITO thin film thermocouple by RF magnetron sputtering

(2017) Yantao Liu et al.   AIP Advances

PECVD synthesis, optical and mechanical properties of silicon carbon nitride films

(2015) Evgeniya Ermakova et al.   APPLIED SURFACE SCIENCE

Experimental Investigation of Hard Turning Mechanisms by PCBN Tooling Embedded Micro Thin Film Thermocouples

(2013) Linwen Li et al.   JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME

Double-layered silicon nitride antireflection coatings for multicrystalline silicon solar cells

(2013) Bingfa Liu et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Optical and Structural Properties of Ammonia-Free Amorphous Silicon Nitride Thin Films for Photovoltaic Applications

(2013) Nafis Ahmed et al.   SPECTROSCOPY LETTERS

Deposition and characterization of low temperature silicon nitride films deposited by inductively coupled plasma CVD

(2011) Abhijeet Kshirsagar et al.   APPLIED SURFACE SCIENCE

Deposition of silicon nitride thin films by RF magnetron sputtering: a material and growth process study

(2011) M.A. Signore et al.   OPTICAL MATERIALS

Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C

(2009) R. M. Tiggelaar et al.   JOURNAL OF APPLIED PHYSICS

Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions

(2009) U. Zaghloul et al.   MICROELECTRONICS RELIABILITY

Silicon nitride film for solar cells

(2008) A. El amrani et al.   RENEWABLE ENERGY