Effect of sputtering pressure on the optical and electrical properties of ITO film on fluorphlogopite substrate
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Title
Effect of sputtering pressure on the optical and electrical properties of ITO film on fluorphlogopite substrate
Authors
Keywords
Magnetron sputtering, Fluorphlogopite, ITO, XRD, SEM
Journal
APPLIED SURFACE SCIENCE
Volume 559, Issue -, Pages 149968
Publisher
Elsevier BV
Online
2021-05-02
DOI
10.1016/j.apsusc.2021.149968
References
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