Deterministic error compensation for slow tool servo-driven diamond turning of freeform surface with nanometric form accuracy

Authors

Keywords

Ultraprecision machining, Diamond turning, Error compensation, Freeform surface, Slow tool servo, Nanometer accuracy, Single-crystal silicon

Journal

Volume 64, Issue -, Pages 45-57

Publisher

Elsevier BV

Online

2021-01-26

DOI

10.1016/j.jmapro.2021.01.015

References

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