Development of a force controlled nanocutting system using a flexible mechanism for adaptive cutting of microstructures on non-planar surfaces

Title
Development of a force controlled nanocutting system using a flexible mechanism for adaptive cutting of microstructures on non-planar surfaces
Authors
Keywords
Force feedback control, Flexible mechanism, Multi-objective optimization, Diamond cutting, Nanocutting
Publisher
Elsevier BV
Online
2021-05-19
DOI
10.1016/j.precisioneng.2021.05.006

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