Ion implantation in β-Ga2O3: Physics and technology

Published 2021 View Full Article

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Title
Ion implantation in β-Ga2O3: Physics and technology
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 39, Issue 3, Pages 030802
Publisher
American Vacuum Society
Online
2021-03-26
DOI
10.1116/6.0000928

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