4.6 Article

Light extraction efficiency and internal quantum efficiency of fully UVC-transparent AlGaN based LEDs

Journal

JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 54, Issue 33, Pages -

Publisher

IOP Publishing Ltd
DOI: 10.1088/1361-6463/ac021a

Keywords

deep UV LED; AlGaN; reflective contact; ray-tracing simulation; light extraction efficiency

Funding

  1. German Federal Ministry of Education and Research (BMBF) within the 'Advanced UV for life' project
  2. Deutsche Forschungsgemeinschaft (DFG) within the Collaborative Research Centre 'Semiconductor Nanophotonics' [SFB 787]

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The light extraction efficiency, external quantum efficiency, and current-voltage characteristics of deep ultraviolet light emitting diodes with different aluminum mole fractions in the p-AlGaN layers were investigated. Optimization of the p-AlGaN layer composition requires a tradeoff between reducing absorption losses and limiting increases in p-contact resistance and operation voltage. Experimental comparison showed DUV-LEDs with UV-transparent p-SPSL and UV-reflective indium contacts had increased operating voltage and a five-fold increase in on-wafer EQE.
The light extraction efficiency (LEE), external quantum efficiency (EQE), and current-voltage characteristics of deep ultraviolet light emitting diodes (DUV-LEDs) with different aluminum mole fractions in the p-AlGaN layers have been investigated. Optimizing the p-AlGaN layer composition requires a tradeoff between reducing the absorption losses and limiting the increases in the p-contact resistance and operation voltage. AlGaN multiple quantum well LEDs emitting around 263 nm with different AlGaN:Mg short period super lattices (p-SPSL) ranging from x = 33% (UV-absorbing) to x = 68% (UV-transparent) average aluminum mole fraction have been explored. DUV-LEDs with different p-contact metals and UV-reflectivities have been characterized by electroluminescence measurements and analyzed by ray-tracing simulations. The comparison shows an increased operating voltage and a five-fold increase of the on-wafer EQE with a maximum value of 3.0% for DUV-LEDs with UV-transparent p-SPSL (x = 68%) and UV-reflective indium contacts in comparison to LEDs with a UV-absorbing p-SPSL (x = 33%). Ray-tracing simulations show that the increase in EQE can be partially ascribed to a 2.5-fold improved LEE in combination with a two-fold increase in internal quantum efficiency.

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