4.6 Article

Influence of Fin-Like Configuration Parameters on the Linearity of AlGaN/GaN HEMTs

Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 68, Issue 4, Pages 1563-1569

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2021.3062561

Keywords

HEMTs; MODFETs; Logic gates; Linearity; Transconductance; Wide band gap semiconductors; Etching; Fin-like high-electron-mobility transistors (HEMTs); GaN HEMTs; gate voltage swing (GVS); linearity; transconductance compensation

Funding

  1. National Key Research and Development Program of China [2020YFB1804902]
  2. National Natural Science Foundation of China [61904135]
  3. China Postdoctoral Science Foundation [2018M640957, BX20200262]
  4. Natural Science Foundation of Shaanxi Province [2020JQ-316]

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This study explores the impact of configuration parameters on Fin-like HEMTs and how adjusting these parameters can optimize performance. The fabricated Fin-like HEMTs showcased excellent performance in terms of transconductance plateau and frequency response, with the potential to become a new paradigm for future wireless communication systems.
In this letter, we explore the impact of configuration parameters for Fin-like high-electron-mobility transistors (HEMTs) formed by partially etching barrier under the gate on improving transconductance (Gm) and cutoff frequency (f(T)) linearity. It is found that the Gm profile for Fin-like HEMTs can be optimized by choosing appropriate device parameters, including the etching depth (H-R) and width (W-R) of recess region, as well as the duty ratio (alpha) of the planar elements in a periodic unit along the gate width. In general, not only does W-R affect the gate voltage swing (GVS) but also H-R and alpha have an important role in Gm profile flatness. In addition, the fabricated Fin-like HEMTs shows a GVS of the transconductance plateau larger than 5.6 V and a constant f(T)/f(max) of 45GHz/65 GHz over a wide gate voltage range. Furthermore, the proposed architecture also features an exceptional linearity performance at 8GHz with an output third-order intercept point (OIP3) of 38.5 dBm, whereas that of the planar HEMT is 31 dBm. The device demonstrated in this article has great potential to be a new paradigm for future wireless communication systems where high linearity is essential.

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