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Title
Analysis of static charge induced pull-in of an electrostatic MEMS
Authors
Keywords
Cantilever, Charge induced pull-in, Clamped-clamped beam, Electrostatic actuation, Partial electrode actuation, Fixed-free beam, Static charge
Journal
Communications in Nonlinear Science and Numerical Simulation
Volume 96, Issue -, Pages 105690
Publisher
Elsevier BV
Online
2021-01-09
DOI
10.1016/j.cnsns.2021.105690
References
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