4.7 Article

Highly catalytic hydrogen sensing properties of the nano percolated Pd/Mg/Ti nanoparticles layers decorated on Si substrate

Journal

APPLIED SURFACE SCIENCE
Volume 549, Issue -, Pages -

Publisher

ELSEVIER
DOI: 10.1016/j.apsusc.2021.149203

Keywords

Pd/Mg/Ti; Percolated surface; H-2 sensor; Fast response time; Stability

Funding

  1. University of Ulsan

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The highly catalytic hydrogen sensing properties of nano percolated Pd/Mg/Ti nanoparticles layers on Si substrate have been investigated. The sensing device shows increased resistance in the presence of hydrogen gas, with a fast response time and stable performance. The sensor has a broad sensing range, fast response time, and good selectivity, making it ideal for hydrogen sensing applications.
Highly catalytic hydrogen sensing properties of the nano percolated Pd/Mg/Ti nanoparticles layers on Si substrate have been investigated. The catalytic nanomaterials (Pd/Mg/Ti) were deposited on the Si substrate by using a radio frequency (RF) magnetron sputtering system. An optimized percolated sensing surface was introduced by varying the deposition conditions of the Pd/Mg/Ti nanoparticles (NPs) layers. After preparing the sensing device, resistance was observed to increase at the presence of hydrogen gas (H-2) and a completely reversible process was recorded for its absence. Besides, the sensor shows significant results such as a broader sensing range (1,000 similar to 40,000 ppm), a fast response time of similar to 1 s for a 10,000 ppm (1 vol%) H-2 concentration at 160 degrees C temperature. A highly stable (up to similar to 50 days) sensing performance and good selectivity were also observed for the sensor. This Pd/Mg/Ti NPs layers on Si substrate have lucrative advantages as an H-2 sensor for fast response and highly stable sensing performance.

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