4.8 Article

Closed-Loop Nanopatterning of Liquids with Dip-Pen Nanolithography

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 13, Issue 12, Pages 14723-14730

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.1c00095

Keywords

scanning probe lithography; dip-pen nanolithography; nanopatterning; closed-loop; nanoreactor

Funding

  1. National Science Foundation [CMMI-1661412]
  2. Air Force Office of Scientific Research [FA9550-16-1-0150]
  3. Boston University Photonics Center

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This study presents a closed-loop method for patterning liquid samples at nanoscale using scanning probe lithography, achieving high accuracy and precision through the use of tipless scanning probes and a novel two-harmonic inertial sensing scheme. By combining fluid mechanics-based iterative control, real-time closed-loop control over patterning is achieved, making scanning probe lithography of liquids a promising candidate for nanoscale manipulation of liquids in high-throughput chemistry.
The ability to reliably manipulate small quantities of liquids is the backbone of high-throughput chemistry, but the continual drive for miniaturization necessitates creativity in how nanoscale samples of liquids are handled. Here, we describe a closed-loop method for patterning liquid samples on pL to sub-fL scales using scanning probe lithography. Specifically, we employ tipless scanning probes and identify liquid properties that enable probe-sample transport that is readily tuned using probe withdrawal speed. Subsequently, we introduce a novel twoharmonic inertial sensing scheme for tracking the mass of liquid on the probe. Finally, this is combined with a fluid mechanics-based iterative control scheme that selects printing conditions to meet a target feature mass to enable closed-loop patterning with better than 1% accuracy and similar to 4% precision in terms of mass. Taken together, these advances address a pervasive issue in scanning probe lithography, namely, real-time closed-loop control over patterning, and position scanning probe lithography of liquids as a candidate for the robust nanoscale manipulation of liquids for advanced high-throughput chemistry.

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