Modelling of electronegative collisional warm plasma for plasma-surface interaction process

Published 2021 View Full Article

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Title
Modelling of electronegative collisional warm plasma for plasma-surface interaction process
Authors
Keywords
-
Journal
PLASMA SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2021-03-02
DOI
10.1088/2058-6272/abeb03

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