Size dependent fracture strength and cracking mechanisms in freestanding polycrystalline silicon films with nanoscale thickness

Title
Size dependent fracture strength and cracking mechanisms in freestanding polycrystalline silicon films with nanoscale thickness
Authors
Keywords
Polycrystalline silicon, Thin film, Tensile test, Fracture mechanisms, Size effect
Journal
ENGINEERING FRACTURE MECHANICS
Volume 168, Issue -, Pages 190-203
Publisher
Elsevier BV
Online
2016-11-01
DOI
10.1016/j.engfracmech.2016.10.003

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