Prediction of material removal rate in chemical mechanical polishing via residual convolutional neural network
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Title
Prediction of material removal rate in chemical mechanical polishing via residual convolutional neural network
Authors
Keywords
Chemical mechanical polishing, Material removal rate, Deep learning, Residual convolutional neural network, Convolutional neural network, Prediction
Journal
CONTROL ENGINEERING PRACTICE
Volume 107, Issue -, Pages 104673
Publisher
Elsevier BV
Online
2020-11-19
DOI
10.1016/j.conengprac.2020.104673
References
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