Straining and Tuning Atomic Layer Nanoelectromechanical Resonators via Comb‐Drive MEMS Actuators
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Title
Straining and Tuning Atomic Layer Nanoelectromechanical Resonators via Comb‐Drive MEMS Actuators
Authors
Keywords
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Journal
Advanced Materials Technologies
Volume -, Issue -, Pages 2000794
Publisher
Wiley
Online
2020-12-12
DOI
10.1002/admt.202000794
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