Precise nanoscale temperature mapping in operational microelectronic devices by use of a phase change material
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Title
Precise nanoscale temperature mapping in operational microelectronic devices by use of a phase change material
Authors
Keywords
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Journal
Scientific Reports
Volume 10, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2020-11-18
DOI
10.1038/s41598-020-77021-1
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