Monolithic integration of a smart temperature sensor on a modular silicon-based organ-on-a-chip device
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Title
Monolithic integration of a smart temperature sensor on a modular silicon-based organ-on-a-chip device
Authors
Keywords
Organs-on-a-chip, Smart temperature sensor, Time-mode domain signal processing, MEMS, CMOS monolithic integration, MEMS-electronics co-fabrication
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 317, Issue -, Pages 112439
Publisher
Elsevier BV
Online
2020-11-21
DOI
10.1016/j.sna.2020.112439
References
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